9780123420701 - optical diagnostics for thin film processing de herman ph.d. massachusetts institute of technology, irving p. (16 resultados)
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Optical Diagnostics for Thin Film Processing
Herman Ph.D. Massachusetts Institute of Technology, Irving P.
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hardcover. Condición: Very Good. Very Good. Used with some reading wear but is still in great reading condition. No markings in text.
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Hardcover. Condición: Good. No Dust Jacket. First Edition. An ex-library copy in original laminated pictorial hard covers of this 783-page volume. The usual ex-libris markings. The binding is sound, the text is clean/unmarked, and there is little cover wear. No dust jacket, apparently as issued. Rafa Lopez (ilustrador). Book.
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Hardcover. Condición: Near Fine. 1st Edition. First Edition/First Printing. Hardcover octavo, not issued with dustjacket. Book is in Near Fine condition. Black pictorial boards with orange and white text. Extrememly minor rubbing to all four corners. Ex-lib stamp to bottom edge and ffep. Ex-lib information written in pencil to g…utter of dedication page. Previous owner's name to ffep. No other marks, highlighting, or writing to textblock. Blank endpapers. Black and white endbands. 783pp. Unless otherwise noted, any variations in color to images are due to photography lighting or shadows, not discoloration of item. [Science].
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Condición: Gut. Zustand: Gut | Seiten: 783 | Sprache: Englisch | Produktart: Bücher | This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diag…nostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field.
Optical Diagnostics for Thin Film Processing
Irving P. Herman Ph.D. Massachusetts Institute of Technology Dr.
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Condición: New. pp. 783.
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Hardcover. Condición: Brand New. 783 pages. 9.50x6.25x1.50 inches. In Stock.
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Condición: New. pp. 783.
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Hardcover. Condición: Like New. LIKE NEW. SHIPS FROM MULTIPLE LOCATIONS. book.
Optical Diagnostics for Thin Film Processing: 1ed
Herman Ph.D. Massachusetts Institute Of Technology, Irving P.
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Optical Diagnostics for Thin Film Processing
Herman Ph.D. Massachusetts Institute of Technology, Irving P.
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Buch. Condición: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical… diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. 783 pp. Englisch.
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Buch. Condición: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diag…nostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field.



