2000; Boston; illustrated, glossy paper covered boards; light wear with some residue on front cover at the top corner; interior is clean and unmarked; 8vo, 7 3/4" to 9 3/4" tall; 265 pages.

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Detalles bibliogr�ficos

T�tulo: An Introduction to Microelectromechanical Systems Engineering
Editor: Artech House Print on Demand
Fecha de publicaci�n: 2000
Idioma: Ingl�s
ISBN 10: 0890065810
ISBN 13: 9780890065815
Encuadernaci�n: Hardcover
Edici�n: 2� Edici�n
Estado: Very Good

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Sinopsis

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

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Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.

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A Squared Books (Don Dewhirst)
10344 Marshall Rd., South Lyon, MI, 48178, U.S.A.

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