An Introduction to Microelectromechanical Systems Engineering

Maluf, Nadim

ISBN 10: 0890065810 ISBN 13: 9780890065815

Editorial: Norwood, Massachusetts, U.S.A.: Artech House on Demand, 1999

Idioma: Ingl�s

Condici�n: Usado - Bueno Encuadernaci�n de tapa dura

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Descripci�n

hardback book in very good to near fine condition. several pages dog-eared. no names,hiliting.etc.

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Detalles bibliogr�ficos

T�tulo

An Introduction to Microelectromechanical Systems Engineering

Editor

Norwood, Massachusetts, U.S.A.: Artech House on Demand

Fecha de publicaci�n

1999

Idioma

Ingl�s

ISBN 10

0890065810

ISBN 13

9780890065815

Encuadernaci�n

Hardcover

Edici�n

2nd Edition

Estado

Very Good

Cat�logos de vendedores

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Sinopsis

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

Acerca del autor

Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.

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Informaci�n empresarial del vendedor

Bingo Books 2
WA, U.S.A.

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