T�tulo: Handbook of Microlithography, Micromachining and Microfabrication, Volume 1 (Materials and Devices Series, 1)
Editor: Institution Of Engineering And Technology
Fecha de publicaci�n: 1997
Idioma: Ingl�s
ISBN 10: 0852969066
ISBN 13: 9780852969069
Encuadernaci�n: Hardcover

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Sinopsis

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

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