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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications: 64 (Topics in Applied Physics) - Tapa blanda
Sinopsis
Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.
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Reseña del editor
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications (Topics in Applied Physics)
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Sputtering by Particle Bombardment III
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Springer Berlin Heidelberg, Springer Berlin Heidelberg Aug 2014, 2014
ISBN 10: 3662311046
ISBN 13: 9783662311042
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Taschenbuch. Condición: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering. 436 pp. Englisch. Nº de ref. del artículo: 9783662311042
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Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications
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Springer Berlin Heidelberg, 2014
ISBN 10: 3662311046
ISBN 13: 9783662311042
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Taschenbuch. Condición: Neu. Druck auf Anfrage Neuware - Printed after ordering - Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering. Nº de ref. del artículo: 9783662311042
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Sputtering by Particle Bombardment III
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Springer Berlin Heidelberg, 2014
ISBN 10: 3662311046
ISBN 13: 9783662311042
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Condición: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today s experimental physics and technology. This is the third and final volume . Nº de ref. del artículo: 5224821
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Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
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Condición: New. Editor(s): Behrisch, Rainer; Wittmaack, Klaus. Series: Topics in Applied Physics. Num Pages: 415 pages, 66 black & white illustrations, 6 black & white tables, biography. BIC Classification: PNFS; TBC; TGM. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 23. Weight in Grams: 664. . 2014. Softcover reprint of the original 1st ed. 1991. paperback. . . . . Nº de ref. del artículo: V9783662311042
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Sputtering by Particle Bombardment III
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Springer Berlin Heidelberg, Springer Berlin Heidelberg Aug 2014, 2014
ISBN 10: 3662311046
ISBN 13: 9783662311042
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Taschenbuch. Condición: Neu. This item is printed on demand - Print on Demand Titel. Neuware -Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering. The particles are characterized by their energy, mass, and angular distributions, along with their charge and excitation states, while the applications described in- clude surface and depth analysis, micromachining, and the production of surface coatings and thin films. As in the previous two volumes, the various chapters have been written by the main authorities in the field. The book addresses a broad audience: scientists active in the field will find the overview and background information they have long been seeking, while students and new comers to surface science and materials science will find a readable introduction to sputtering.Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg 436 pp. Englisch. Nº de ref. del artículo: 9783662311042
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