Artículos relacionados a CMOS Gate-Stack Scaling - Materials, Interfaces and...

CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Symposium Held April 14-16, 2009, San Francisco, California, U.s.a.: 1155 (MRS Proceedings) - Tapa dura

 
9781605111285: CMOS Gate-Stack Scaling - Materials, Interfaces and Reliability Implications: Symposium Held April 14-16, 2009, San Francisco, California, U.s.a.: 1155 (MRS Proceedings)
Tapa dura
ISBN 10: 1605111287 ISBN 13: 9781605111285
Editorial: Cambridge University Press, 2009

Sinopsis

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Cambridge University Press
Año de publicación
2009
Idioma
Inglés
ISBN 10 
1605111287
ISBN 13 
9781605111285
Encuadernación
Tapa dura
Número de páginas
194
Editor
Demkov Alexander A., Taylor Bill, Harris H. Rusty
Contacto del fabricante
no disponible
Persona responsable
gpsr@libri.de
gpsr@libri.de

Europaallee 1
Bad Hersfeld
36244
Alemania