Polymers for Microelectronics: Resists and Dielectrics: 537 (ACS Symposium Series) - Tapa dura

9780841227217: Polymers for Microelectronics: Resists and Dielectrics: 537 (ACS Symposium Series)

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ISBN 10: 0841227217 ISBN 13: 9780841227217

Editorial: American Chemical Society, 1994

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Presents recent advances in chemically amplified resists for deep UV, electron beam, and X-ray advanced lithographic technologies. Discusses top surface imaging and dry development resists. Examines the fundamental chemistry of radiation-sensitive materials, including dielectric polymers for integrated circuits and interconnect systems. Valuable reading for polymer chemists, radiation chemists, and materials scientists.

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Editorial: American Chemical Society
A�o de publicaci�n: 1994
Idioma: Ingl�s
ISBN 10: 0841227217
ISBN 13: 9780841227217
Encuadernaci�n: Tapa dura
N�mero de p�ginas: 554
Editor: Thompson Larry F., Willson C. Grant, Tagawa Seiichi
Contacto del fabricante: no disponible
Persona responsable: no disponible

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