Proceedings of Workshop on Compact Storage Ring Technology: Applications to Lithography; Held at the Brookhaven National Laboratory, March 4-5, 1986 BNL 52005

Descripción

[2], vi, 45, [1] pages. Figures. Tables. Formulae. Some wear to front cover. Includes Executive Summary; Statement of Steering Committee; Agenda; Workshop Report, Conclusions, and Recommendations; Report of Planning Working Group; Report of Lithography Working Group; Report of Machine Design Working Group; and List of Attendees. In general, the discussions at the workshop clearly exceeded the original scope of the meeting, which was to provide a platform for the semiconductor industry to collectively address and speak on these issues and their needs. During the meeting, the urgency of the program was made clear, as well as the interests of industry to engage in cooperative development of x-ray lithography using the existing technology base for design of synchrotron radiation x-ray sources. During the meeting, the urgency of the program was made clear, as well as the interests of industry to engage in cooperative development of x-ray lithography using the existing technology base for design of synchrotron radiation x-ray sources. The National Synchrotron Light Source (NSLS) at Brookhaven National Laboratory (BNL) in Upton, New York is a national user research facility funded by the U.S. Department of Energy (DOE). Built from 1978 through 1984, and officially shut down on September 30, 2014, the NSLS was considered a second-generation synchrotron. The NSLS experimental floor consists of two electron storage rings: an X-ray ring and a VUV (vacuum ultraviolet) ring which provide intense, focused light spanning the electromagnetic spectrum from the infrared through X-rays. The properties of this light and the specially designed experimental stations, called beamlines, allow scientists in many fields of research to perform experiments not otherwise possible at their own laboratories. Ground was broken for the NSLS on September 28, 1978. The VUV ring began operations in late 1982 and the X-ray ring was commissioned in 1984. In 1986, a second phase of construction expanded the NSLS by 52,000 square feet (4,800 m2), which added offices, laboratories and room for new experimental equipment. After 32 years of producing synchrotron light, the final stored beam was dumped at 16.00 EDT on 30 September 2014, and NSLS was officially shut down. During the construction of the NSLS, two scientists, Renate Chasman and George Kenneth Green, invented a special periodic arrangement of magnetic elements (a magnetic lattice) to provide optimized bending and focusing of electrons. The design was called the Chasman-Green lattice, and it became the basis of design for every synchrotron storage ring. Storage rings are characterized by the number of straight sections and bend sections in their design. The bend sections produce more light than the straight sections due to the change in angular momentum of the electrons. Chasman and Green accounted for this in their design by adding insertion devices, known as wigglers and undulators, in the straight sections of the storage ring. These insertion devices produce the brightest light among the sections of the ring and thus, beamlines are typically built downstream from them.

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Detalles bibliográficos

Título

Proceedings of Workshop on Compact Storage Ring Technology: Applications to Lithography; Held at the Brookhaven National Laboratory, March 4-5, 1986 BNL 52005

Editor

Brookhaven National Laboratory, National Synchrotron Light Source, Upton, New York

Fecha de publicación

1986

Encuadernación

Staplebound

Edición

Presumed First Edition, First printing.

Estado

Good