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Detalles bibliogr�ficos

T�tulo: Glow Discharge Processes: Sputtering and Plasma Etching
Editor: Wiley-Interscience
Fecha de publicaci�n: 1980
Idioma: Ingl�s
ISBN 10: 047107828X
ISBN 13: 9780471078289
Encuadernaci�n: hardcover
Edici�n: 1st Edition.
Estado: Good

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Sinopsis

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.

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