Treatise on Clean Surface Technology

This item is printed on demand - it takes 3-4 days longer - Neuware -1. UV/Ozone Cleaning of Surfaces.- 1. Introduction.- 2. The Variables of UV/Ozone Cleaning.- 2.1. The Wavelengths Emitted by the UV Sources.- 2.2. Distance between the Sample and the UV Source.- 2.3. The Contaminants.- 2.4. The Precleaning.- 2.5. The Substrate.- 2.6. Rate Enhancement Techniques.- 3. The Mechanism of UV/Ozone Cleaning.- 4. UV/Ozone Cleaning in Vacuum Systems.- 5. Safety Considerations.- 6. UV/Ozone Cleaning Facility Construction.- 7. Applications.- 8. Effects Other Than Cleaning.- 8.1. Oxidation.- 8.2. UV-Enhanced Outgassing.- 8.3. Other Surface/Interface Effects.- 8.4. Etching.- 9. Summary and Conclusions.- References and Notes.- 2. Techniques for Cleaning Liquid Surfaces.- 1. Introduction.- 2. The Origin of Dynamic Liquid Surface Phenomena.- 3. The Notion of Surface Cleanliness.- 4. The History of Clean Surfaces.- 5. The Nature of Surface Contamination.- 6. Cleaning Techniques.- 6.1. Primary Distillation.- 6.2. Further Distillation.- 6.3. Bubble Cleaning.- 6.4. Surface Skimming and Talc Cleaning.- 6.5. Solid Adsorption Techniques.- 6.6. Laser Burning.- 6.7. Solution Preparation.- 6.8. Surface Cleaning in Engineering Applications.- 7. Materials for Clean-Surface Experiments.- 7.1. Principles.- 7.2. Construction of Apparatus.- 7.3. Water Storage Materials.- 8. Cleaning of Apparatus.- 8.1. ¿Hard¿ Materials¿Chromic Acid.- 8.2. Perspex¿Detergents.- 9. General Design Considerations.- 10. Summary.- References.- 3. Hydroson Cleaning of Surfaces.- 1. Introduction.- 2. The Hydroson System.- 3. Experimental Investigation of Mechanisms in the Tank.- 4. Commercial Applications of Hydroson Cleaning.- 5. Safety and Economy.- 6. Recent Developments.- 6.1. Wire Cleaning.- 6.2. Coil Strip Cleaning.- 6.3. Barrel Cleaning and Rinsing.- 6.4. Cleaning Molds in the Glass Industry.- 6.5. Nuclear Industry.- 6.6. Phosphating.- 6.7. Electrodeposition.- 7. Size and Cost of Equipment.- 8. Comparison with Ultrasonic and Megasonic Cleaning.- 9. Conclusion.- References.- 4. Methods of Measurement of Ionic Surface Contamination.- 1. Introduction.- 2. Ionic Measurement.- 3. Static Extraction Methods.- 3.1. Egan¿s Method.- 3.2. Method of Hobson and DeNoon.- 3.3. Omega Meter.- 3.4. Ion Chaser.- 3.5. Contaminometer.- 4. Dynamic Extraction Method-Ionograph.- 5. Applications of Ionic Contamination Measurements.- 6. Future Prospects.- 7. Summary.- References.- 5. Characterization of Surface Contaminants by Luminescence Using Ultraviolet Excitation.- 1. Introduction.- 2. The Luminescence Technique for Surface Detection.- 3. Applications.- 3.1. The Use of UV ¿Black Light¿ for Surface Detection.- 3.2. Study of Workers¿ Skin Contamination by the ¿Skin-Wash¿ Method.- 3.3. The Fiberoptic Luminoscope for Monitoring Occupational Skin Contamination.- 3.4. Detection of Surface Contamination with the Spill Spotter.- 3.5. Remote Sensing with Laser-Based Fluorosensors.- 3.6. A Fluorescent Tracer Detection Technique.- 3.7. Studies of Absorption of Carcinogenic Materials into Mouse Skin.- 3.8. Chromogenic and Fluorogenic Spot Test Techniques.- 3.9. Sensitized Fluorescence Spot Tests.- 3.10. Surface Detection by Room Temperature Phosphorimetry.- 4. Conclusion.- References.- 6. Particulate Surface Contamination and Device Failures.- 1. Introduction.- 2. Sources of Particulate Contamination.- 2.1. Air.- 2.2. Chemicals.- 2.3. Gases.- 2.4. Wafer Handling.- 3. Effects on Device Performance.- 3.1. Particulate Contamination on Photomasks.- 3.2. Epitaxial Growth.- 3.3. Failure Mechanism in MOS Gate Oxides.- 3.4. Impurity Contamination in Silicon.- 4. Summary.- References.- 7. Effect of Surface Contamination on the Performance of HVDC Insulators.- 1. Introduction.- 2. General Overview of the Flashover Process.- 3. Deposition of Particles.- 3.1. Introduction.- 3.2. The Electrical Environment.- 3.3. Charging Mechanisms.- 3.4. Particle Deposition Rates.- 4. Deposition of Moisture.- 5. Thermal Processes.- 6.