Sputtering Materials for VLSI and Thin Film Devices

Idioma: inglés

Editorial: Elsevier Science Okt 2013, 2013

0815515936 / 9780815515937

Librería: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, AlemaniaBuchWeltWeit Ludwig Meier e.K.

Vendedor de 5 estrellas

Vendedor de IberLibro desde 11 de enero de 2012

Tapa dura

Condición: Nuevo

EUR 163,00

Envío por EUR 23,00 
Se envía de Alemania a Estados Unidos de America

Cantidad disponible: 2 disponibles

Añadir al carrito
Devoluciones gratuitas de 30 días

Descripción del artículo del vendedor

This item is printed on demand - it takes 3-4 days longer - Neuware -An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . 608 pp. Englisch. …

N° de ref. del artículo 9780815515937

Título
Sputtering Materials for VLSI and Thin Film Devices
Autor
Jaydeep Sarkar
Editorial
Elsevier Science Okt 2013
Año de publicación
2013
Estado
Neu
Encuadernación
Buch
Idioma
inglés
ISBN 10
0815515936
ISBN 13
9780815515937
Peso del artículo
1398 gramos
Dimensiones
241x194x32 mm

BuchWeltWeit Ludwig Meier e.K.

Bergisch Gladbach, Alemania

Vendedor de 5 estrellas

Vendedor de IberLibro desde 11 de enero de 2012

Tarifas de envío de Alemania a Estados Unidos de America

ArtículoDe 5 a 15 días hábilesDe 5 a 15 días hábiles
Primer artículoEUR 23,00EUR 23,00
Los plazos de entrega los establecen los vendedores y varían según el transportista y la ubicación. Los pedidos que pasan por la aduana pueden sufrir retrasos y los compradores son responsables de los aranceles o tarifas asociadas. Los vendedores pueden ponerse en contacto con usted en relación con cargos adicionales para cubrir cualquier aumento en los costes de envío de los artículos.

Métodos de pago

  • Visa
  • Mastercard
  • American Express
  • Carte Bleue
  • Apple Pay
  • Google Pay
  • Cheque
  • Giro bancario
  • PayPal

Información empresarial del vendedor

BuchWeltWeit Ludwig Meier e.K.

Alemania

BuchWeltWeit Inh. Ludwig Meier e.K.
Inhaber: Ludwig Meier
De-Gasperi-Str. 8
51469 Bergisch Gladbach
Deutschland

Tel.: +49(0)22028659300
Fax: +49(0)22028659301
E-Mail: info@buchweltweit.de

Registergericht: Amtsgericht Köln
Registernummer: HRA 28253

Umsatzsteuer-Identifikationsnummer: DE815259907

Wir sind zur Teilnahme an einem Streitbeilegungsverfahren vor einer Verbraucherschlichtungsstelle weder verpflichtet noch bereit.