This is perhaps the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics operating on this scale, namely, quantum wave-particle phenomena, and quantum wave phenomena, Then, readers learn the potential building blocks for NanoMEMS applications, including, nanoelectromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer, and the Casimir oscillator, as well as a number of quantum computing implementation paradigms. Finally, NanoMEMS applications in photonics are addressed, including nanophotonic light sources and plasmonic devices. The text provides newcomers with a much needed coherent scientific base for undertaking study and research in this field.

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H�ctor J. De Los Santos is president and CTO of NanoMEMS Research LLC in Irvine, California. He is also the author of successful RF MEMS book that Artech House published. He is a respected person within the MEMS and NEMS community

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