Principles and Applications of NanoMEMS Physics

This is perhaps the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics operating on this scale, namely, quantum wave-particle phenomena, and quantum wave phenomena, Then, readers learn the potential building blocks for NanoMEMS applications, including, nanoelectromechanical quantum circuits and systems such as charge detectors, the which-path electron interferometer, and the Casimir oscillator, as well as a number of quantum computing implementation paradigms. Finally, NanoMEMS applications in photonics are addressed, including nanophotonic light sources and plasmonic devices. The text provides newcomers with a much needed coherent scientific base for undertaking study and research in this field.