Devoted primarily to the many applications of microsensors, this text covers thermal, radiation, mechanical, magnetic, chemical and biological microsensors. Information is also provided on basic processing, interfacing and bus systems, microsensor array and intelligent sensors.

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The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors--the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.

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