780pp.incl.index; HB white w/blk.&purple; PONft.endpaper, otherwise fine condition w/clean,tight pgs. "This self-contained reference/text details both elementary and advanced aspects of submicron microlithography -- providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field." illus.

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Detalles bibliogr�ficos

T�tulo

Microlithography: Science and Technology

Editor

Marcel Dekker, Inc., New York

Fecha de publicaci�n

1998

Idioma

Ingl�s

ISBN 10

0824799534

ISBN 13

9780824799533

Encuadernaci�n

Hardcover

Edici�n

2nd

Estado

Fine

Estado de la sobrecubierta

No Jacket

Cat�logos de vendedores

Stan

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Sinopsis

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.

Cr�ticas

"The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field." -International Journal of Electrical Engineering Education Promo Copy

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Descripci�n de la librer�a

3,000 sq ft 35,000 + books mostly out of print, rare, many foreign language. especially strong in NATIVE AMERICA, WESTERN AMERICANA,SCIENCE, TECHNICAL,ART. Been here 30+. No international orders please too many scammers (Australians) and constantly changing rules and people in Germany complaining and adding weird new hoops (Extended Producer Responsibility) to jump through. Every country wants it's own tax form and tax ID and and VAT Number and IOSS ID or countless other acronyms that change weeksly and it's not worth it for us sorry.

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Xochi's Bookstore & Gallery
NM, U.S.A.

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