T�tulo: Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Editor: Marcel Dekker Inc
Fecha de publicaci�n: 1998
Idioma: Ingl�s
ISBN 10: 0824799518
ISBN 13: 9780824799519
Encuadernaci�n: Hardcover
Estado: Brand New

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Sinopsis

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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Saburo Nonogaki, Ueno Takumi, Toshio Ito

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Informaci�n empresarial del vendedor

Edward Bowditch Ltd
Exstowe, Exton, Exeter, EX3 0PP, United Kingdom

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Legal entity name: Edward Bowditch Ltd
Legal entity form: Limited company
Business correspondence address: Exstowe, Exton, Exeter, EX3 0PP
Company registration number: 04916632
VAT registration: GB834241546
Authorised representative: Mr. E. Bowditch