T�tulo: MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85)
Editor: SPIE Publications
Fecha de publicaci�n: 2000
Idioma: Ingl�s
ISBN 10: 0819437166
ISBN 13: 9780819437167
Encuadernaci�n: hardcover
Estado: Good

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Sinopsis

The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.

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