An Introduction to Microelectromechanical Systems Engineering

Nadim Maluf

ISBN 10: 0890065810 ISBN 13: 9780890065815

Editorial: Artech House Publishers, 2000

Idioma: Ingl�s

Condici�n: Nuevo Encuadernaci�n de tapa dura

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Detalles bibliogr�ficos

T�tulo: An Introduction to Microelectromechanical Systems Engineering
Editor: Artech House Publishers
Fecha de publicaci�n: 2000
Idioma: Ingl�s
ISBN 10: 0890065810
ISBN 13: 9780890065815
Encuadernaci�n: Hardcover
Edici�n: 2� Edici�n
Estado: new

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Sinopsis

A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.

Acerca del autor

Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.

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