T�tulo: Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography (SPIE Press Monograph Vol. PM39)
Editor: Society of Photo-Optical Instrumentation Engineers
Fecha de publicaci�n: 1997
Idioma: Ingl�s
ISBN 10: 0819423785
ISBN 13: 9780819423788
Encuadernaci�n: Hardcover

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Sinopsis

Book by Harry J Levinson Mark A McCord Franco Cerrina Robe

Rese�a del editor

The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.

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