Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output.
MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.
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Yong Ping Xu graduated from Department of Physics, Nanjing University, Nanjing, China, in 1977 and received his PhD degree from School of Electrical Engineering, University of New South Wales, Sydney, N.S.W., Australia, in 1994. From 1978 to 1987, he worked at Qingdao Semiconductor Research Institute in China as an IC Design Engineer, Deputy R&D Manager, and Director. From 1996 to 1998, he was a Lecturer at University of South Australia, Adelaide, Australia. Later, he joined the Department of Electrical & Computer Engineering, National University of Singapore, in 1998 where he is currently working as an Associate Professor. His current research includes integrated interface and readout circuits for MEMS and sensors and biomedical circuits and systems. Professor Xu is a member of Technical Program Committee of Symposium on VLSI Circuits (VLSI) since 2017. He served as a member of IEEE International Solid-State Circuits Conference (ISSCC) from 2014 to 2018 and Technical Program Committee of IEEE Asian Solid-State Circuits Conference (A-SSCC) from 2009 to 2013. He was the Organizing Committee Chair for A-SSCC 2013 and has been a member of Steering Committee of A-SSCC since 2014. He also served as a TPC Co-chair of 2007 and 2009 IEEE International symposium on Radio Frequency Integration Technology (RFIT). He was the co-recipient of 2007 DAC/ISSCC Student Design Contest Award and the recipient of 2004 Excellent Teacher Award from National University of Singapore. Professor Xu is a Distinguished Lecturer of IEEE Solid-State Circuits Society from 2017 to 2018.
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