全新正版图书 集成电路工艺实验基础石建军东华大学出版社9787566922137金奥莱图书

Integrated Circuit Process Experimental Foundation(Chinese Edition)

paperback. Condición: New. Language:Chinese.Paperback. Pub Date: 2023-06 Publisher: Donghua University Press The book is divided into 3 chapters. with a total of 26 experiments. Chapter 1 is the basic process. including vacuum technology. cleaning and oxidation of silicon wafers. experimental teaching of photolithography process flow. oxygen plasma etching. plasma enhanced chemical vapor deposition. magnetron sputtering to prepare metal films. and atomic layer deposition to prepare nanofilms. Experimental principles an. Nº de ref. del artículo: DR007853

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