DESIGN, ANALYSIS AND SYNTHESIS OF CO GAS SENSOR USING MEMS TECHNOLOGY: MEMS TECHNOLOGY - Tapa blanda

B, Priya Esther; Y, Jeyashree; A, Vimala Juliet

 
9786207810208: DESIGN, ANALYSIS AND SYNTHESIS OF CO GAS SENSOR USING MEMS TECHNOLOGY: MEMS TECHNOLOGY
Tapa blanda
ISBN 10: 6207810201 ISBN 13: 9786207810208
Editorial: LAP LAMBERT Academic Publishing, 2025

Sinopsis

This Book reports design, analysis and synthesis of silicon based carbon monoxide gas sensor using MEMS technology. The emphasis is on investigating the temperature of micro-hotplate to the variation in the power as the analyte is sensitive to specific gas at high temperature. The general approach pursued in this work is to explore the possibility of using micro-hotplate for sensing the gas. For the completion of the sensor design, analysis is the vital part as it shows the temperature distribution in the micro-hotplate. In realizing the aim of the book a silicon based carbon monoxide gas sensor for chemical sensing is designed and simulated. The sensing film used for the detection of carbon monoxide gas is tin oxide film. It is extensively used in gas sensor applications as it is sensitive to specific gas at high temperatures. In order to achieve such high operating temperature, a microstructure called the micro-hotplate was developed.

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Editorial
LAP LAMBERT Academic Publishing
Año de publicación
2025
Idioma
Inglés
ISBN 10 
6207810201
ISBN 13 
9786207810208
Encuadernación
Tapa blanda
Número de páginas
80
Contacto del fabricante
no disponible
Persona responsable
no disponible