Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography - Tapa blanda

Sinopsis

and overview.- Sputtering of multicomponent materials.- Chemical sputtering.- Sputtering by electrons and photons.- Sputtering of solids with neutrons.- Heavy ion sputtering induced surface topography development.- Development of surface topography due to gas ion implantation.

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