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Laser-Assisted Microtechnology: v. 19 (Springer Series in Materials Science) - Tapa dura

Metev, Simeon M.; Veiko, Vadim P.

 
9783540539254: Laser-Assisted Microtechnology: v. 19 (Springer Series in Materials Science)

Sinopsis

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

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Reseña del editor

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.

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