Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems - Tapa blanda

9783527334988: Enabling Technology for MEMS and Nanodevices: Advanced Micro and Nanosystems

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ISBN 10: 352733498X ISBN 13: 9783527334988

Editorial: Wiley-VCH Verlag GmbH, 2013

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Cr�ticas

"Overall, the book gives good insight into very recent technologies, developments, and practical applications in the MEMS field. I would recommend this book as supplementary reading for graduate students, but not as a class text since the book assumes the reader already has fundamental knowledge in this research field. The book is also a very useful source for professionals in related areas of materials science and mechanical and chemical engineering who want to become aware of emerging MEMS technologies." Advanced Materials "... an excellent book that gives a good overview and discussion of sensors and devices commonly found in the field of MEMS as well as more advanced devices..." MRS Bulletin

Rese�a del editor

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing. An insider's view of industrial MEMS commercialization is followed by chapters on capacitive interfaces for MEMS, packaging issues of micro- and nanosystems, MEMS contributions to high frequency integrated resonators and filters, and the uses of MEMS in mass data storage and electrochemical imaging by means of scanning micro- and nanoprobes. The second section on nanodevices first tackles the emerging topic of nanofluidics with a contribution each on simulation tools and on devices and uses, followed by another two on nanosensors featuring CNT sensors and CMOS-based DNA sensor arrays, respectively.

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EditorialWiley-VCH Verlag GmbH
A�o de publicaci�n2013
ISBN 10 352733498X
ISBN 13 9783527334988
Encuadernaci�nTapa blanda
IdiomaIngl�s
N�mero de p�ginas439
EditorBaltes Henry, Brand Oliver, Fedder Gary K., Hierold Christofer, Korvink Jan G., Tabata Osamu