Microelectromechanical Systms v1139: Materials and Devices II (MRS Proceedings) - Tapa dura

 
9781605111117: Microelectromechanical Systms v1139: Materials and Devices II (MRS Proceedings)
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ISBN 10: 1605111112 ISBN 13: 9781605111117
Editorial: Cambridge University Press, 2009

Sinopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Reseña del editor

Microelectromechanical systems (MEMS) have transitioned from a technology niche to a role of major industrial significance. The worldwide market for MEMS is now approximately $10 billion, and the total value of systems enabled by MEMS is several orders of magnitude higher than this figure. As the market has grown, the material and process sets have broadened and departed from their semiconductor roots. In addition to engineering materials, there is now great interest in integrating multifunctional nanomaterials, smart materials and biomaterials within MEMS/NEMS to enhance functionality, performance and reliability. The opportunities created by this integration have generated a vibrant research community working on new materials and processes. This book reflects the breadth of topics currently under investigation in the field. Novel materials and accompanying processes are discussed, as are more conventional materials and processes. Consistent themes are the need for accurate material property assessment at the relevant length scales and for suitable metrology tools to support the introduction of new materials.

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Editorial
Cambridge University Press
Año de publicación
2009
Idioma
Inglés
ISBN 10 
1605111112
ISBN 13 
9781605111117
Encuadernación
Tapa dura
Número de páginas
264
Editor
Bagdahn Jörg, Sheppard Jr Norman F., Vengallatore Srikar
Contacto del fabricante
no disponible
Persona responsable
Avery
https://www.avery.fr/

chemin des peupliers 27
Dardilly
Francia

Otras ediciones populares con el mismo título

9781107408395: Microelectromechanical Systems: Volume 1139: Materials and Devices II (MRS Proceedings)

Edición Destacada

ISBN 10:  1107408393 ISBN 13:  9781107408395
Editorial: Cambridge University Press, 2014
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