Microelectromechanical Systems - Materials and Devices (MRS Proceedings) - Tapa dura

 
9781558999909: Microelectromechanical Systems - Materials and Devices (MRS Proceedings)
Tapa dura
ISBN 10: 1558999906 ISBN 13: 9781558999909
Editorial: Cambridge University Press, 2008

Sinopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

This book is part of a popular series on the materials science of MEMS devices. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there remains a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.

Reseña del editor

This book is part of a popular series on the materials science of MEMS devices, first published in 1999. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there REMAINS a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Cambridge University Press
Año de publicación
2008
Idioma
Inglés
ISBN 10 
1558999906
ISBN 13 
9781558999909
Encuadernación
Tapa dura
Número de páginas
342
Editor
LaVan David. A
Contacto del fabricante
no disponible
Persona responsable
Avery
https://www.avery.fr/

chemin des peupliers 27
Dardilly
Francia