Optical Lithography for Advanced Semiconductor Patterning (Press Monographs) - Tapa dura

Bisschop, Peter De

 
9781510680333: Optical Lithography for Advanced Semiconductor Patterning (Press Monographs)
Tapa dura
ISBN 10: 1510680330 ISBN 13: 9781510680333
Editorial: SPIE Press, 2025

Sinopsis

Optical lithography is one of the key technologies in the fabrication of microchips. This book gives an account of modern lithography during the first half of the 2020s, when high-NA extreme-ultraviolet lithography (EUVL) was being introduced. Central to the book is a comprehensive description of the effects that impact the quality of the optical image inside the resist layer, a story that has become more complicated with every new lithography tool generation. This discussion builds gradually so that anyone with a graduate-type background in physics, chemistry, or mathematics can follow it from the start to the many subtleties of image formation in high-NA EUVL. It uses mathematics when useful and is accompanied by examples and case studies, many of which were created specifically for this book. This book will be of value for people who are new to lithography as well as for the more experienced lithographer.

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Editorial
SPIE Press
Año de publicación
2025
Idioma
Inglés
ISBN 10 
1510680330
ISBN 13 
9781510680333
Encuadernación
Tapa dura
Número de páginas
1156
Contacto del fabricante
no disponible
Persona responsable
no disponible