Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings) - Tapa blanda

De Boer, Maarten P.

 
9781107413214: Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings)
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ISBN 10: 1107413214 ISBN 13: 9781107413214
Editorial: Cambridge University Press, 2014

Sinopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Reseña del editor

Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing.

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Editorial
Cambridge University Press
Año de publicación
2014
Idioma
Inglés
ISBN 10 
1107413214
ISBN 13 
9781107413214
Encuadernación
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Número de páginas
332
Contacto del fabricante
no disponible
Persona responsable
Avery
https://www.avery.fr/

chemin des peupliers 27
Dardilly
Francia

Otras ediciones populares con el mismo título

9781558995130: Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605: Symposium Held November 29-December 1, 1999, Boston, Massachusetts, U.S.A (MRS Proceedings)

Edición Destacada

ISBN 10:  1558995137 ISBN 13:  9781558995130
Editorial: Cambridge University Press, 2000
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