Doping Engineering for FrontEnd Processing: Volume 1070 (MRS Proceedings) - Tapa blanda

Pawlak, B. J.

 
9781107408548: Doping Engineering for FrontEnd Processing: Volume 1070 (MRS Proceedings)
Tapa blanda
ISBN 10: 1107408547 ISBN 13: 9781107408548
Editorial: Cambridge University Press, 2014

Sinopsis

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Cambridge University Press
Año de publicación
2014
Idioma
Inglés
ISBN 10 
1107408547
ISBN 13 
9781107408548
Encuadernación
Tapa blanda
Número de páginas
334
Contacto del fabricante
no disponible
Persona responsable
gpsr@libri.de
gpsr@libri.de

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