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Cmos GateStack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155 (MRS Proceedings) - Tapa blanda

Demkov, Alexander A.

 
9781107408326: Cmos GateStack Scaling - Materials, Interfaces and Reliability Implications: Volume 1155 (MRS Proceedings)
Tapa blanda
ISBN 10: 1107408326 ISBN 13: 9781107408326
Editorial: Cambridge University Press, 2014

Sinopsis

CMOS Gate-Stack Scaling Materials, Interfaces and Reliability Implications

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Cambridge University Press
Año de publicación
2014
Idioma
Inglés
ISBN 10 
1107408326
ISBN 13 
9781107408326
Encuadernación
Tapa blanda
Número de páginas
192
Contacto del fabricante
no disponible
Persona responsable
gpsr@libri.de
gpsr@libri.de

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