Kinetic Studies in GeO2/Ge System: A Retrospective from 2021 (Frontiers in Semiconductor Technology) - Tapa blanda

Wang, Sheng-Kai

 
9781032258485: Kinetic Studies in GeO2/Ge System: A Retrospective from 2021 (Frontiers in Semiconductor Technology)
Tapa blanda
ISBN 10: 1032258489 ISBN 13: 9781032258485
Editorial: CRC Press, 2024

Sinopsis

Kinetic Studies in GeO2/Ge System: A Retrospective from 2021 investigates reaction kinetics in GeO2/Ge systems, aiming to demonstrate the fundamentals of the GeO2/Ge interface and to give insight into the distinctive features and performance of Ge (germanium) applied to advanced complementary metal oxide semiconductor (CMOS) devices.

This book first reviews the development of MOS technology and discusses the potentials of emerging Ge and the challenges facing it as a contentious channel material, once promising to replace Si (silicon) for advanced nodes. The study systematically analyzes the following aspects of GeO2/Ge stacks that will shed light on the characteristics and reaction principles of the system: GeO2/Ge degradation, Ge passivation techniques, desorption kinetics of GeO from GeO2/Ge, the relationship between GeO2 crystallization and GeO2/Ge interface reaction, and the oxidation kinetics of Ge. Based on findings from the intrinsic properties of GeO2/Ge, the author also compares it with prevalent SiO2/Si systems and demonstrates the essential differences between the two, contributing to quality control, process optimization, and technology advancements of GeO2/Ge.

The book will be a useful reference for researchers, professionals, and students interested in electronic materials, condenser matter physics, microelectronic engineering, and semiconductors.

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Acerca del autor

Sheng-Kai Wang is a professor in the Institute of Microelectronics at the Chinese Academy of Sciences (IMECAS), China, and Director General of the Youth Innovation Promotion Association of IMECAS. He has been engaged in Ge, III-V, and SiC in MOS technology for years and has published more than 100 papers and authorized more than 40 patents.

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Editorial
CRC Press
Año de publicación
2024
Idioma
Inglés
ISBN 10 
1032258489
ISBN 13 
9781032258485
Encuadernación
Tapa blanda
Número de edición
1
Número de páginas
134
Contacto del fabricante
Taylor and Francis, GPSR Taylor and Francis
gpsr@taylorandfrancis.com

Taylor & Francis Verlag GmbH, Kaufingerstraße 24
München
80331
Alemania

Otras ediciones populares con el mismo título

9781032257440: Kinetic Studies in GeO2/Ge System: A Retrospective from 2021 (Frontiers in Semiconductor Technology)

Edición Destacada

ISBN 10:  103225744X ISBN 13:  9781032257440
Editorial: CRC Press, 2022
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