Computational Modeling in Semiconductor Processing (The Artech House Materials Science Library) - Tapa dura

Meyyappan, M.

 
9780890067079: Computational Modeling in Semiconductor Processing (The Artech House Materials Science Library)
Tapa dura
ISBN 10: 0890067074 ISBN 13: 9780890067079
Editorial: Artech House Publishers, 1994

Sinopsis

This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes. The work is intended for those new to the field of process and equipment simulation in electronics materials processing, and also for the experienced modeller. It also contains coverage suitable for graduate students in materials science, and chemical, mechanical and electrical engineering.

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes. The work is intended for those new to the field of process and equipment simulation in electronics materials processing, and also for the experienced modeller. It also contains coverage suitable for graduate students in materials science, and chemical, mechanical and electrical engineering.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Artech House Publishers
Año de publicación
1994
Idioma
Inglés
ISBN 10 
0890067074
ISBN 13 
9780890067079
Encuadernación
Tapa dura
Número de páginas
363
Contacto del fabricante
no disponible
Persona responsable
no disponible