Handbook of Microlithography, Micromachining and Microfabrication: v.1 (IEE Materials & Devices S.) - Tapa dura

 
9780852969069: Handbook of Microlithography, Micromachining and Microfabrication: v.1 (IEE Materials & Devices S.)
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ISBN 10: 0852969066 ISBN 13: 9780852969069
Editorial: Institution of Engineering and Technology, 1997

Sinopsis

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Reseña del editor

Provides a comprehensive resource for both the micro-electronics device manufacturing field and newer application areas such as sensors, actuators and biomedical devices.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Institution of Engineering and Technology
Año de publicación
1997
Idioma
Inglés
ISBN 10 
0852969066
ISBN 13 
9780852969069
Encuadernación
Tapa dura
Número de páginas
776
Editor
Choudhury P.Rai-
Contacto del fabricante
no disponible
Persona responsable
no disponible

Otras ediciones populares con el mismo título

9780819497864: Handbook of Microlithography, Micromachining, and Microfabrication, Volume 1: Microlithography (Press Monographs)

Edición Destacada

ISBN 10:  081949786X ISBN 13:  9780819497864
Editorial: SPIE Press, 1997
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