Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set - Tapa dura

Madou, Marc J.

 
9780849331800: Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Tapa dura
ISBN 10: 0849331803 ISBN 13: 9780849331800
Editorial: CRC Press, 2011

Sinopsis

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

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Acerca del autor

Marc J. Madou, University of California, Irvine USA.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
CRC Press
Año de publicación
2011
Idioma
Inglés
ISBN 10 
0849331803
ISBN 13 
9780849331800
Encuadernación
Tapa dura
Número de edición
3
Número de páginas
1992
Contacto del fabricante
no disponible
Persona responsable
no disponible