Microlithography: Science and Technology - Tapa dura

 
9780824799533: Microlithography: Science and Technology
Tapa dura
ISBN 10: 0824799534 ISBN 13: 9780824799533
Editorial: CRC Press, 1998

Sinopsis

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.

"Sinopsis" puede pertenecer a otra edición de este libro.

Críticas

"The editors have done an excellent job of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field." -International Journal of Electrical Engineering Education Promo Copy

Reseña del editor

This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
CRC Press
Año de publicación
1998
Idioma
Inglés
ISBN 10 
0824799534
ISBN 13 
9780824799533
Encuadernación
Tapa dura
Número de edición
1
Número de páginas
800
Editor
Smith Bruce W., Suzuki Kazuaki
Contacto del fabricante
no disponible
Persona responsable
no disponible