Optical Imaging in Projection Microlithography (Tutorial Texts) - Tapa blanda

Wong, Alfred K.

 
9780819458292: Optical Imaging in Projection Microlithography (Tutorial Texts)
Tapa blanda
ISBN 10: 0819458295 ISBN 13: 9780819458292
Editorial: SPIE Press, 2005

Sinopsis

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
SPIE Press
Año de publicación
2005
Idioma
Inglés
ISBN 10 
0819458295
ISBN 13 
9780819458292
Encuadernación
Tapa blanda
Número de páginas
276
Contacto del fabricante
no disponible
Persona responsable
no disponible