Sinopsis
This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.
"Sinopsis" puede pertenecer a otra edición de este libro.
Reseña del editor
This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.
"Sobre este título" puede pertenecer a otra edición de este libro.
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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)
Publicado por
SPIE Publications, 1999
ISBN 10: 0819430528
ISBN 13: 9780819430526
Antiguo o usado
paperback
Librería: HPB-Red, Dallas, TX, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
paperback. Condición: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Nº de ref. del artículo: S_471604712
Comprar usado
EUR 42,59
Envío por EUR 3,23
Se envía dentro de Estados Unidos de America
Se envía dentro de Estados Unidos de America
Cantidad disponible: 1 disponibles