Integrated Micromotion Systems: Micromachining, Control and Applications - Tapa dura

Sinopsis

Over the past thousand years civilization has concentrated on the development of tools and devices of human size or larger. In this new discipline of Integrated Micro-Motion Systems, the miniaturization of mechanical devices and systems is intensively studied down to the size of micron meters as small as biological cells. Recently, electronics technology has been developing on the basis of semiconductor micro-devices, so-called LSI circuits of which the critical dimensions are measured in sub-microns. The influence of LSI circuits are obvious, and they have had a great impact on civilization. The capability of LSI circuits however is predominately in signal processing. Today, micro systems technology which incorporates mechanical motion with signal processing is developing rapidly by using the same fabrication processes as LSI circuits. The goal of this particular field is to develop an integrated micro motion system which is composed of micro mechanical components, actuators, sensors and logic circuits, namely, an autonomous micro robot.

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