Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6) - Tapa dura

 
9780444823632: Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6)
Tapa dura
ISBN 10: 0444823638 ISBN 13: 9780444823632
Editorial: Elsevier Science Ltd, 1998

Sinopsis

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

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Reseña del editor

In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Elsevier Science Ltd
Año de publicación
1998
Idioma
Inglés
ISBN 10 
0444823638
ISBN 13 
9780444823632
Encuadernación
Tapa dura
Número de páginas
276
Editor
Fukuda T., Menz Wolfgang
Contacto del fabricante
no disponible
Persona responsable
Barbara Criscuolo
b.criscuolo@lswr.it

Via Spadolini, 7
Milano
20141
Italia