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Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6) - Tapa dura
Sinopsis
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
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In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
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Handbook of Sensors and Actuators: Micro Mechanical Systems: Principles and Technology (Volume 6)
Librería: Anybook.com, Lincoln, Reino Unido
Calificación del vendedor: 5 de 5 estrellas
Condición: Good. Volume 6. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In good all round condition. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,700grams, ISBN:0444823638. Nº de ref. del artículo: 5762902
Cantidad disponible: 1 disponibles
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Micro Mechanical Systems : Principles and Technology
Publicado por
Elsevier Science & Technology, 1998
ISBN 10: 0444823638
ISBN 13: 9780444823632
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Original o primera edición
Librería: Better World Books Ltd, Dunfermline, Reino Unido
Calificación del vendedor: 5 de 5 estrellas
Condición: Good. 1st Edition. Ships from the UK. Used book that is in clean, average condition without any missing pages. Nº de ref. del artículo: 17413166-20
Cantidad disponible: 2 disponibles
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Micro Mechanical Systems : Principles and Technology Volume 6
Publicado por
ELSEVIER SCIENCE & TECHNOLOGY, 1998
ISBN 10: 0444823638
ISBN 13: 9780444823632
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Librería: Buchpark, Trebbin, Alemania
Calificación del vendedor: 5 de 5 estrellas
Condición: Sehr gut. Zustand: Sehr gut | Sprache: Englisch | Produktart: Bücher. Nº de ref. del artículo: 11914303/202
Cantidad disponible: 1 disponibles
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Micro Mechanical Systems : Principles and Technology Volume 6
Publicado por
ELSEVIER SCIENCE & TECHNOLOGY, 1998
ISBN 10: 0444823638
ISBN 13: 9780444823632
Antiguo o usado
Tapa dura
Librería: Buchpark, Trebbin, Alemania
Calificación del vendedor: 5 de 5 estrellas
Condición: Gut. Zustand: Gut | Sprache: Englisch | Produktart: Bücher. Nº de ref. del artículo: 11914303/3
Cantidad disponible: 1 disponibles
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Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6, Band 6)
Publicado por
Elsevier Science, 1998
ISBN 10: 0444823638
ISBN 13: 9780444823632
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Librería: Roland Antiquariat UG haftungsbeschränkt, Weinheim, Alemania
Calificación del vendedor: 5 de 5 estrellas
Hardcover: 17.8 x 1.9 x 23 cm. Illustrated. 276 p. Neu und originalverschweißt! --- Brand new and welded! 9780444823632 Sprache: Englisch Gewicht in Gramm: 662. Nº de ref. del artículo: 214963
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Micro Mechanical Systems, Vol. 6
Librería: Majestic Books, Hounslow, Reino Unido
Calificación del vendedor: 5 de 5 estrellas
Condición: New. pp. 276. Nº de ref. del artículo: 8356402
Cantidad disponible: 3 disponibles
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Micro Mechanical Systems, Vol. 6
Librería: Books Puddle, New York, NY, Estados Unidos de America
Calificación del vendedor: 4 de 5 estrellas
Condición: New. pp. 276. Nº de ref. del artículo: 26540141
Cantidad disponible: 3 disponibles
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Micro Mechanical Systems: Principles and Technology (Handbook of Sensors and Actuators)
Publicado por
Elsevier Science 1998-07-24, 1998
ISBN 10: 0444823638
ISBN 13: 9780444823632
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Librería: Chiron Media, Wallingford, Reino Unido
Calificación del vendedor: 4 de 5 estrellas
Hardcover. Condición: New. Nº de ref. del artículo: 6666-ELS-9780444823632
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Micro Mechanical Systems
Impresión bajo demandaLibrería: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Alemania
Calificación del vendedor: 5 de 5 estrellas
Buch. Condición: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. 276 pp. Englisch. Nº de ref. del artículo: 9780444823632
Cantidad disponible: 2 disponibles
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Micro Mechanical Systems : Principles and Technology
Impresión bajo demandaLibrería: AHA-BUCH GmbH, Einbeck, Alemania
Calificación del vendedor: 5 de 5 estrellas
Buch. Condición: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. Nº de ref. del artículo: 9780444823632
Cantidad disponible: 2 disponibles