Integrated Processing for Micro- and Optoelectronics: Proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 ... Research Aociety Symposia Proceedings S.) - Tapa dura

 
9780444819833: Integrated Processing for Micro- and Optoelectronics: Proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 ... Research Aociety Symposia Proceedings S.)
Tapa dura
ISBN 10: 0444819835 ISBN 13: 9780444819833
Editorial: Elsevier Science Ltd, 1994

Sinopsis

These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Elsevier Science Ltd
Año de publicación
1994
Idioma
Inglés
ISBN 10 
0444819835
ISBN 13 
9780444819833
Encuadernación
Tapa dura
Número de páginas
320
Editor
Nissim Yves I., Etc., Katz A., Rubloff G.W.
Contacto del fabricante
no disponible
Persona responsable
no disponible