Methods of Measurement for Semiconductor Materials, Process Control, and Devices: Quarterly Report, October 1 to December 31, 1970 (Classic Reprint) - Tapa dura

Sinopsis

Excerpt from Methods of Measurement for Semiconductor Materials, Process Control, and Devices: Quarterly Report, October 1 to December 31, 1970

This is the tenth quarterly report to the sponsors of the Joint Program on Methods of Measurement for Semiconductor Materials, Process Control, and Devices. It summarizes work on a wide variety of measure ment methods that are being studied at the National Bureau of Standards. Since the Program is a continuing one, the results and conclusions re ported here are subject to modification and refinement.

Fourteen tasks, each directed toward a particular material or device property or measurement technique, have been identified as parts of the Program. The report is subdivided according to these tasks. Highlights of activity during the quarter are given in Section 2. Section 3 deals with tasks on methods of measurement for materials; Section 4, with those on methods of measurement for process control; and Section 5, with those on methods of measurement for devices. References for each section are listed in a separate subsection at the end of that section.

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