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The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering) - Tapa dura
Sinopsis
The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapour phase epitaxial growth, sputtering and chemical vapour deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapour deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.
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The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapour phase epitaxial growth, sputtering and chemical vapour deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapour deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.
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The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)
Publicado por
Oxford University Press, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
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Librería: World of Books (was SecondSale), Montgomery, IL, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Condición: Acceptable. Item in very good condition! Textbooks may not include supplemental items i.e. CDs, access codes etc. Nº de ref. del artículo: 00074089260
Cantidad disponible: 1 disponibles
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The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering)
Publicado por
Oxford University Press (edition ), 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Antiguo o usado
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Librería: BooksRun, Philadelphia, PA, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Hardcover. Condición: Fair. The item might be beaten up but readable. May contain markings or highlighting, as well as stains, bent corners, or any other major defect, but the text is not obscured in any way. Nº de ref. del artículo: 0195105087-7-1
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The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering)
Publicado por
Oxford University Press, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Antiguo o usado
Tapa dura
Librería: ThriftBooks-Dallas, Dallas, TX, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Hardcover. Condición: Fair. No Jacket. Readable copy. Pages may have considerable notes/highlighting. ~ ThriftBooks: Read More, Spend Less. Nº de ref. del artículo: G0195105087I5N00
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The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering)
Publicado por
Oxford University Press, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Antiguo o usado
Tapa dura
Librería: ThriftBooks-Dallas, Dallas, TX, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Hardcover. Condición: Very Good. No Jacket. May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less. Nº de ref. del artículo: G0195105087I4N00
Cantidad disponible: 1 disponibles
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The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering)
Publicado por
Oxford University Press, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
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Tapa dura
Librería: HPB-Red, Dallas, TX, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
hardcover. Condición: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Nº de ref. del artículo: S_434409613
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The Science and Engineering of Microelectronic Fabrication
Publicado por
Oxford University Press, Incorporated, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
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Librería: Better World Books, Mishawaka, IN, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Condición: Very Good. Used book that is in excellent condition. May show signs of wear or have minor defects. Nº de ref. del artículo: 11224431-75
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The Science and Engineering of Microelectronic Fabrication
Publicado por
Oxford University Press, Incorporated, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
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Librería: Better World Books, Mishawaka, IN, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Condición: Good. Used book that is in clean, average condition without any missing pages. Nº de ref. del artículo: 4384494-6
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The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)
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Oxford University Press, New York
ISBN 10: 0195105087
ISBN 13: 9780195105087
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Librería: Alien Bindings, BALTIMORE, MD, Estados Unidos de America
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Hardcover. Condición: Good. No Jacket. First Edition. Hardcover edition in Good+ condition. There are sparse highlights and underlining in ink; otherwise, the book is in Very Good condition. The covers are in great shape. The edges of the text block are stamped. The binding is square and tight. Small abrasion to the front flyleaf. The book will be carefully packaged for shipment for protection from the elements. USPS electronic tracking number issued free of charge. Nº de ref. del artículo: 15114
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The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering)
Publicado por
Oxford University Press, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
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Librería: HPB-Ruby, Dallas, TX, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
hardcover. Condición: Very Good. Connecting readers with great books since 1972! Used books may not include companion materials, and may have some shelf wear or limited writing. We ship orders daily and Customer Service is our top priority! Nº de ref. del artículo: S_450644353
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The Science and Engineering of Microelectronic Fabrication
Publicado por
Oxford University Press, Incorporated, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Antiguo o usado
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Librería: Better World Books Ltd, Dunfermline, Reino Unido
Calificación del vendedor: 5 de 5 estrellas
Condición: Good. Ships from the UK. Former library book; may include library markings. Used book that is in clean, average condition without any missing pages. Nº de ref. del artículo: GRP30410464
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