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Sinopsis
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
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Reseña del editor
Specifically designed for the user who wants expanded use of ellipsometry beyond the relatively limited number of turn-key applications, this text provides comprehensive discussion of the measurement of film thickness and optical constants in films. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry and the effect of substrate roughness. The text's concepts and applications are reinforced through 14 case studies that aim to illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
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A User's Guide to Ellipsometry
Publicado por
Academic Press, 1992
ISBN 10: 0126939500
ISBN 13: 9780126939507
Antiguo o usado
Tapa dura
Librería: The Book Corner, Beaverton, OR, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
hardcover. Condición: Very Good. Hardback. No dust jacket. Cover edges and corners in good shape. Spine is tight. Former owner's name inside front cover Pages are clean, no markings, notes or stains. Ships from Friends bookstore to benefit Beaverton (Oregon) library. Nº de ref. del artículo: mon0000061385
Cantidad disponible: 1 disponibles
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A User's Guide to Ellipsometry
Librería: Toscana Books, AUSTIN, TX, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Hardcover. Condición: new. Excellent Condition.Excels in customer satisfaction, prompt replies, and quality checks. Nº de ref. del artículo: Scanned0126939500
Cantidad disponible: 1 disponibles
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A USER'S GUIDE TO ELLIPSOMETRY.
Publicado por
Academic Press:, 1993
ISBN 10: 0126939500
ISBN 13: 9780126939507
Antiguo o usado
Tapa dura
Librería: PASCALE'S BOOKS, NORTH READING, MA, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Hard Cover. Condición: Fine-. 260 pages. "Ellipsometry is a very old technque for studying surfaces and thein films. It is also used extensively in integrated circuit(IC) manufacture and development, in corrosion science, and various other areas. The fundamental principles of the technqiues are well known. Although the literature is extensive, the few available books deal with the subect on a level that is too mathematical or theoretical for most casual users. FINE- HARDCOVER, black cloth covers, lettering is bright on the spine and cover. Size: 8vo - over 7¾" - 9¾" tall. Nº de ref. del artículo: 028511
Cantidad disponible: 1 disponibles
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A User's Guide to Ellipsometry
Publicado por
Academic Press, 1992
ISBN 10: 0126939500
ISBN 13: 9780126939507
Antiguo o usado
Tapa dura
Librería: HPB-Red, Dallas, TX, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
Hardcover. Condición: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Nº de ref. del artículo: S_377864099
Cantidad disponible: 1 disponibles
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A User's Guide to Ellipsometry
Librería: BennettBooksLtd, San Diego, NV, Estados Unidos de America
Calificación del vendedor: 5 de 5 estrellas
hardcover. Condición: New. In shrink wrap. Looks like an interesting title! Nº de ref. del artículo: Q-0126939500
Cantidad disponible: 1 disponibles