Artículos relacionados a Plasma Etching: An Introduction

Plasma Etching: An Introduction - Tapa blanda

 
9780123959669: Plasma Etching: An Introduction
Tapa blanda
ISBN 10: 0123959667 ISBN 13: 9780123959669
Editorial: Academic Press, 2016

Sinopsis

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

"Sinopsis" puede pertenecer a otra edición de este libro.

Reseña del editor

Plasma etching plays an essential role in microelectronic circuit manufacturing. Suitable for researchers, process engineers, and graduate students, this book introduces the basic physics and chemistry of electrical discharges and relates them to plasma etching mechanisms. Throughout the volume the authors offer practical examples of process chemistry, equipment design, and production methods.

"Sobre este título" puede pertenecer a otra edición de este libro.

Editorial
Academic Press
Año de publicación
2016
Idioma
Inglés
ISBN 10 
0123959667
ISBN 13 
9780123959669
Encuadernación
Tapa blanda
Número de páginas
490
Editor
Manos Dennis M.
Contacto del fabricante
no disponible
Persona responsable
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