Optical Metrology - Tapa dura

Reseña del editor

Optical metrology, or the use of optical techniques for measurement, has progressed rapidly in recent years. Modern sources of radiation, modulators, beam scanners, photo detectors and the computer-assisted detection and display of information have all contributed to the growing interest in the application of optical technology for the solution of a wide variety of measurement problems. This self-contained introduction to the field covers both fundamental theory and practical applications.