MEMS Mechanical Sensors (Microelectromechanical Systems Series.) - Tapa dura

The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.

Microelectromechanical systems (MEMS) are ushering in the next generation of technology in medicine, transportation, manufacturing, and electronics. MEMS sensors are a key component to this new technology. Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication and application of MEMS sensors. With this practical guide to design tools and packaging, professionals and academics can create the sensors they need for a complete range of next generation applications. This new resource covers all the major areas of MEMS sensors and takes an especially close look at pressure and inertial sensors. Engineers can tap into current and future market trends in such key applications areas as force and torque, flow in microfluidics, and displacement.MarketElectronics/mechanical engineers and researchers involved with MEMS, as well as graduate engineering students in related courses.ContentsIntroduction. Materials and Fabrication Techniques. Design Tools. Packaging. Physical Sensing Techniques. Pressure Sensors. Force and Torque Sensors. Inertial Sensors. Flow Sensors for Microfluidics. Displacement Sensors.