Advanced Metallization and Interconnect Systems for ULSI Applications in 1997: Volume 13: 5-13 (MRS Conference Proceedings) - Tapa dura

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

The scope of this conference has migrated to focus on the understanding, fabrication and application of copper or low-dielectric constant materials. At the same time, it has also retained its original emphasis on leading-edge material, interface and process science that has made the series so unique. The volume features two keynote addresses -- one on "Interconnect and Design Opportunities for the 1 GHz Microprocessor", the other on "System Module With Chip-on-Chip Technology for Realizing True System LSIS".