This self-contained, comprehensive book describes the fundamental properties of soft x-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft x-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include EUV lithography, biomicroscopy, spectromicroscopy, EUV astronomy, synchrotron radiation, and soft x-ray lasers. He also provides a great deal of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practicing engineers involved in semiconductor fabrication and materials science.
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"The region of the electromagnetic spectrum covered by this excellently written and produced book has only become available to exploitation over the last couple of decades or so...every researcher, teacher and student involved with the generation, manipulation or applications of electromagnetic radiation in this part of the spectrum should make space on their desk (not the bookshelf, since it won't spend much time there!) for this wonderful addition to the literature." Contemporary Physics
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Descripción Spain: Cambridge Univ Pr, 2007. Soft cover. Estado de conservación: New. 1st Edition. Ship out 1-2 business day,Brand new,US edition, Free tracking number usually 2-4 biz days delivery to worldwide Same shipping fee with US, Canada,Europe country, Australia, item will ship out from either LA or Asia,ht. Nº de ref. de la librería ABE-7308560371
Descripción Cambridge University Press, 2007. Paperback. Estado de conservación: New. 1. Nº de ref. de la librería DADAX052102997X
Descripción Cambridge University Press, 2007. Paperback. Estado de conservación: New. Never used!. Nº de ref. de la librería P11052102997X
Descripción Cambridge University Press, 2007. Paperback. Estado de conservación: New. book. Nº de ref. de la librería M052102997X
Descripción Cambridge Univ Pr, 2007. Paperback. Estado de conservación: Brand New. 1st edition. 471 pages. 10.00x8.00x1.00 inches. In Stock. Nº de ref. de la librería 052102997X